To enable measuring a surface shape in a desired visual field of an object at a time without complicating a circuit constitution.
There are provided an optical system for irradiating beams including lights of slightly different wavelengths which are emitted from a dual wavelength laser 1 to the desired visual field at a surface of the object 20, a two-dimensional imaging device 16 for receiving beat lights formed by a second analyzer 11 from the beams reflected by the object surface, a timing generator 15 for controlling an exposure timing to image in a short exposure time with respect to a cycle of the beat lights, and an image processor 17 for obtaining a phase of beat lights from imaging outputs at each pixel position for each pixel position and obtaining a height at the object surface from the obtained phase for each pixel position. The surface shape of the object 20 can be measured at a time without complicating the constitution by setting a plurality of wavelength detection circuits in an array or the like manner.
TAKAHASHI FUMIYUKI
FUSE TAKASHI
OSHIMA YOSHITAKA
TSUKAHARA HIROYUKI
Next Patent: METHOD AND APPARATUS FOR MEASURING THREE-DIMENSIONAL SHAPE