PURPOSE: To rationalize and automate the test of a logical printed circuit board by bringing an one-pin probe equipped with a drive means of a three-dimensional direction to the scanning/contact state with an LSI socket to be measured to perform a test.
CONSTITUTION: The movable contact means (one-pin probe) 11 selectively brought into contact with an LSI being an object 14 to be tested at every input/ output electrode of the LSI is provided and driven in three-dimensional directions X, Y, Z by an electrode driving means 12. By this method, test data for testing/ judgement is supplied to the input electrode of the LSI 14 by the means 11. The test data of the output electrode of the LSI 14 is detected by the means 11 and the detection result is judged by a test judging means 13. As a result, the defect due to a socket adaptor system is eliminated.
KAMEYAMA SHUICHI
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