APPARATUS FOR TRANSMITTING HEAT UNDER VACUUM BY GRAIN

Title:

APPARATUS FOR TRANSMITTING HEAT UNDER VACUUM BY GRAIN

Document Type and Number:

Japanese Patent JPH0243937

Kind Code:

A

Abstract:

PURPOSE: To easily heat an object in vacuum without contamination by placing a special material which assures the transmission of uniform heat along may passages between the object and a heat source but does not lead to a sealing problem.

CONSTITUTION: The apparatus for transmitting the heat between the heat source 12 and the object 21 in a vacuum vessel 1 is provided with means 24, 25 for mounting the object 21 in the supporting bodies 8, 4 in the vessel 1. A cavity 26 is formed by the supporting body 8, the object 21 and a wall 20 and thermally conductive grains 30 for forming part of the heat source 12 are filled into the cavity 26. The grains 30 are capable of following up the thermal expansion of the object 21 and the easy heating of the object 21 by the heat transmission is made possible without contamination.

Inventors:

BUSHIEBE BERUNAARU
KARUBA KUROODO
RORAN BERUNAARU
BARON BURUNO

Application Number:

JP12548389A

Publication Date:

February 14, 1990

Filing Date:

May 18, 1989

Export Citation:

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Assignee:

COMMISSARIAT ENERGIE ATOMIQUE

International Classes:

H01L39/24; B01J3/00; C23C14/22; C23C14/24; C30B25/10; F27B5/04; F27B17/00; F27D99/00; H01L21/00; H01L21/203; H05B3/60; H05K7/20; (IPC1-7): B01J3/00; C23C14/22; H01L21/203; H01L39/24; H05K7/20

Attorney, Agent or Firm:

Akira Asamura (3 outside)

Next Patent: VACUUM GENERATION METHOD