Title:
APPEARANCE INSPECTION AUXILIARY DEVICE AND APPEARANCE INSPECTION AUXILIARY METHOD
Document Type and Number:
Japanese Patent JP2020101482
Kind Code:
A
Abstract:
To provide an appearance inspection auxiliary device that can accurately detect a foreign matter without requiring skill of an operator.SOLUTION: An appearance inspection auxiliary device comprises: a spectroscope that selectively transmits wavelength of light reflected by an object; an imaging unit that receives the light which has transmitted through the spectroscope to image a spectral image of the object; a spectral image acquisition unit that acquires the spectral image based on the inspection wavelength from the imaging unit by controlling the wavelength transmitted by the spectroscope to be the inspection wavelength depending on the object; an optical intensity variation amount calculation unit that calculates an optical intensity variation amount which is a difference between optical intensity and a predetermined reference value, of each pixel of the spectral image; a dispersion calculation unit that calculates a parameter indicating dispersion of the optical intensity variation amount in a pixel range including a target pixel of the spectral image; and a determination unit that determines whether or not the parameter is within a predetermined range.SELECTED DRAWING: Figure 2
Inventors:
WATANABE RYOKI
Application Number:
JP2018240834A
Publication Date:
July 02, 2020
Filing Date:
December 25, 2018
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01N21/84; G01N21/88
Domestic Patent References:
| JP2016161435A | 2016-09-05 | |||
| JP6329668B1 | 2018-05-23 | |||
| JP2009128078A | 2009-06-11 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka