Title:
プラズマ反応器の電極に電力を印加すること
Document Type and Number:
Japanese Patent JP7098654
Kind Code:
B2
Abstract:
A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distributor to deliver a processing gas to the plasma chamber, a pump coupled to the plasma chamber to evacuate the chamber, a workpiece support to hold a workpiece, and an intra-chamber electrode assembly that includes a plurality of filaments extending laterally through the plasma chamber between a ceiling of the plasma chamber and the workpiece support. Each filament including a conductor surrounded by a cylindrical insulating shell. The plurality of filaments includes a first multiplicity of filaments and a second multiplicity of filaments arranged in an alternating pattern with the first multiplicity of filaments. An RF power source is configured to apply a first RF input signal to the first multiplicity of filaments.
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Inventors:
Collins, Kenneth S.
Lamas Wormi, Curtic
Kuo, Yue
Rauf, Shahid
Bella, Carol
Carducci, James Dee.
Rice, Michael Earl.
Lamas Wormi, Curtic
Kuo, Yue
Rauf, Shahid
Bella, Carol
Carducci, James Dee.
Rice, Michael Earl.
Application Number:
JP2019557446A
Publication Date:
July 11, 2022
Filing Date:
April 23, 2018
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H05H1/46; C23C16/509; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2004128159A | ||||
| JP2014049541A | ||||
| JP2004055600A | ||||
| JP2006185715A | ||||
| JP2007084919A |
Foreign References:
| US20090133840 | ||||
| US6161499 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation
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