Title:
半導体洗浄用のアルキメデスブラシ
Document Type and Number:
Japanese Patent JP7177110
Kind Code:
B2
Abstract:
A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel.
More Like This:
| WO/2001/022475 | METHOD FOR DICING MESA-DIODES |
| JPS62211927 | METHOD OF WORKING SEMICONDUCTOR WAFER |
Inventors:
bradley scott withers
Eric Scott Nelson
Robert Allen Willis
Eric Scott Nelson
Robert Allen Willis
Application Number:
JP2020037766A
Publication Date:
November 22, 2022
Filing Date:
March 05, 2020
Export Citation:
Assignee:
Illinois Tours Works Inc.
International Classes:
H01L21/304; A46B11/06; A46D1/00
Domestic Patent References:
| JP2000015190A | ||||
| JP60186085U | ||||
| JP2007330536A | ||||
| JP2007007501A |
Foreign References:
| US20130255721 | ||||
| US20130133692 |
Attorney, Agent or Firm:
Aoki Atsushi
Shinji Mihashi
Koichi Ito
Shinji Mihashi
Koichi Ito