Title:
ARRANGEMENT STRUCTURE OF SENSORS, AND CONVEYING DEVICE
Document Type and Number:
Japanese Patent JP2015005683
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an arrangement structure of sensors capable of downsizing a conveyance chamber by devising arrangement positions of three sensors for detecting an edge position of a disc-shaped conveyance object placed on a hand.SOLUTION: A conveyance driving mechanism 1 comprises a hand 23 movable along a linear moving path between a conveyance start position and a delivery position. The conveyance driving mechanism 1 is accommodated within a conveyance chamber A. Among three sensors 6L, 6C and 6R arranged side by side in a direction orthogonal with the moving path of the hand 23 in a planar view, the first sensor 6L is disposed at a position where a coordinate of an X axis takes a negative value, on an orthogonal coordinate system specified by a Y axis coincident with the regular moving path of the hand and the X axis orthogonal with the Y axis, the second sensor 6R is disposed at a position where a coordinate of the X axis takes a positive value, and the third sensor 6C to be arranged between these sensors 6L and 6R is disposed at a position where a coordinate of the X axis takes a positive value.
Inventors:
OTANI JUNICHI
SAEKI TORU
SHIGETA TAKASHI
SAEKI TORU
SHIGETA TAKASHI
Application Number:
JP2013131313A
Publication Date:
January 08, 2015
Filing Date:
June 24, 2013
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD
International Classes:
H01L21/68; B25J19/02; H01L21/677
Domestic Patent References:
| JP2001210698A | 2001-08-03 |
Attorney, Agent or Firm:
Sadaya Sano