TRANSFER ROBOT AND TRANSFER METHOD OF DISK-SHAPED TRANSFER OBJECT

Japanese Patent JP2015005684

A

PROBLEM TO BE SOLVED: To prevent lowering in detection accuracy due to variation in scan timing of a sensor for detecting a wafer mounted on a hand, and accurately determine the difference between the position of the wafer mounted on the hand and a normal mounting position to securely transfer the wafer.SOLUTION: It is detected that three peripheral positions in a wafer 7 on a hand 23 which is in a stopped state and starts moving to a delivery position from a transfer start position have passed photoelectronic sensors 6L, 6C, 6R on the basis of changes in output signals of the respective photoelectronic sensors 6L, 6C, 6R. The center position of the wafer 7 is calculated on the basis of the movement amount of the wafer 7 on the orthogonal coordinate system which can be extracted from the detection information and position information of the respective photoelectronic sensors 6L, 6C, 6R. An operation instruction to specify an operation amount of a transfer driving mechanism 1 is generated on the basis of the difference between the center position of the wafer 7 and a reference center position, and operation of the transfer driving mechanism 1 is controlled on the basis of the operation instruction.

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OTANI JUNICHI
SAEKI TORU
SHIGETA TAKASHI

JP2013131314A

January 08, 2015

June 24, 2013

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SINFONIA TECHNOLOGY CO LTD

H01L21/677; B25J13/08

JP2000068359A

2000-03-03

Sadaya Sano

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