Title:
ARRAY OF ULTRASONIC TRANSDUCERS
Document Type and Number:
Japanese Patent JP2007195248
Kind Code:
A
Abstract:
To provide an enhanced ultrasonic transducer comprising a piezoelectric layer having a high piezoelectric coupling coefficient (k).
This invention relates to an array of ultrasonic transducers each comprising a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient (k) and is textured. The invention further relates to an ultrasonic transducer and to a method of manufacturing an array of ultrasonic transducers.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
KLEE MAREIKE KATHARINE
SCHLENKER TILMAN ULRICH
DANNAPPEL OLAF
LOEBL HANS-PETER
SCHMITZ GEORG DR
FRASER JOHN DOUGLAS
SCHLENKER TILMAN ULRICH
DANNAPPEL OLAF
LOEBL HANS-PETER
SCHMITZ GEORG DR
FRASER JOHN DOUGLAS
Application Number:
JP2007098761A
Publication Date:
August 02, 2007
Filing Date:
April 04, 2007
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV
International Classes:
H04R17/00; B06B1/06; H01L41/08; H01L41/09; H01L41/187; H01L41/22; H02N2/00
Domestic Patent References:
| JPH11205898A | 1999-07-30 | |||
| JPH05260596A | 1993-10-08 | |||
| JP2000332569A | 2000-11-30 | |||
| JP2000244029A | 2000-09-08 | |||
| JPH03274899A | 1991-12-05 |
Attorney, Agent or Firm:
Tadahiko Ito