Title:
ARTICLE, SHUTTER, OPTICAL DEVICE, AND MANUFACTURING METHOD OF ARTICLE
Document Type and Number:
Japanese Patent JP2022191754
Kind Code:
A
Abstract:
To provide a shutter capable of long-term stable high-speed operation even when the light shielding blades, which are thin plates, undergo dynamic elastic deformation (bending) during the opening and closing operation, and the light shielding blades contact or slide against each other while suppressing the generation of stray light.SOLUTION: An article includes: a base material; a DLC layer covering at least a portion of the base material; and an antireflection layer covering at least a portion of the DLC layer. The manufacturing method of the article includes: a step of forming a DLC layer on at least part of the base material; and a step of forming an antireflection layer on at least a portion of the DLC layer.SELECTED DRAWING: Figure 1
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Inventors:
ARAI KAZUHIRO
Application Number:
JP2021100185A
Publication Date:
December 28, 2022
Filing Date:
June 16, 2021
Export Citation:
Assignee:
CANON KK
International Classes:
G02B1/113; G03B9/28
Attorney, Agent or Firm:
Patent Attorney Corporation Chikajima International Patent Office