AUTOMATIC ELECTRON BEAM ANALYZER

Title:

AUTOMATIC ELECTRON BEAM ANALYZER

Document Type and Number:

Japanese Patent JP2000268764

Kind Code:

A

Abstract:

To automatically analyze an analyzing point by automatically positioning the analyzing point to the beam center without a manual operation.

This automatic analyzer 1 has a stage 7 for moving a sample against an electron beam 12, and an image processing means 4 which obtains an image data obtained by irradiation of the electron beam 12 in a different visual field magnification and calculates positional data of a branch point in the different visual field magnification. By automatically recognizing the branch point under the analyzing condition for the sample by electron beam analysis, automatic positioning of analyzing point to the beam center can be performed without a normal operation, thereby automatic analysis is performed.

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Inventors:

NIWA NAOMASA
YAMADA TADASHI
YAHAGI EIJI

Application Number:

JP7343499A

Publication Date:

September 29, 2000

Filing Date:

March 18, 1999

Export Citation:

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Assignee:

SHIMADZU CORP

International Classes:

H01J37/21; G01N23/225; H01J37/252; (IPC1-7): H01J37/252; G01N23/225; H01J37/21

Attorney, Agent or Firm:

Matsumoto Takemoto (1 person outside)

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