Title:
AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
Document Type and Number:
Japanese Patent JP2020021939
Kind Code:
A
Abstract:
To provide a method for processing a substrate on a substrate support assembly which enables both lateral and azimuthal tuning of heat transfer between an electrostatic chuck and a substrate.SOLUTION: A method 500 includes a step of processing a first substrate using a first temperature profile on an ESC having primary heaters and spatially tunable heaters. A deviation profile is determined from a result of processing the first substrate from a target result profile. The first temperature profile is adjusted to a second temperature profile on the ESC on the basis of the deviation profile. A step of adjusting to the second temperature profile includes a step of incrementing power to one or more spatially tunable heaters in one or more discrete locations corresponding to the deviations profile. A second substrate is then processed on the ESC using the second temperature profile.SELECTED DRAWING: Figure 5
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Inventors:
ZHANG CHUNLEI
PHILLIP CRIMINALE
STEVEN E BABAYAN
DAVID ULLSTROM
PHILLIP CRIMINALE
STEVEN E BABAYAN
DAVID ULLSTROM
Application Number:
JP2019141139A
Publication Date:
February 06, 2020
Filing Date:
July 31, 2019
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
H01L21/02; H01L21/265; H01L21/3065; H01L21/683; H05B3/00
Domestic Patent References:
| JP2014525663A | 2014-09-29 |
Foreign References:
| US20140220709A1 | 2014-08-07 |
Attorney, Agent or Firm:
Yoshiaki Anzai
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