To provide a barrier film with a transparent electrode which decreases damages of a barrier layer in a post process such as patterning of the transparent and hardly causes deterioration in the barrier property.

The barrier film is obtained by depositing a barrier layer 2 comprising silicon oxide (SiOx) or silicon nitride (SiNy) or their mixture (SiNnOm) and an acrylic protective layer 3 in order on one surface of a transparent plastic film 17, and depositing an adhesive layer 4, a barrier layer 5 comprising silicon oxide or silicon nitride or their mixture, an acrylic protective layer 6 and a transparent electrode layer 7 in order on the other surface. The acrylic protective layer is formed by acryl flash vapor deposition.