Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6771347
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress turbulence of downflow caused by a rotating flow.SOLUTION: A substrate processing apparatus according to an embodiment, comprises: a holding part; a driving part; an air flow formation part; a cup; and an air flow control mechanism. The holding part holds a substrate. The driving part rotates the holding part. The air flow formation part is arranged on an upper direction of the substrate held by the holding part, and forms a downward air flow. The cup is arranged so as to surround a side of the substrate held to the holding part, and includes an opening provided on the upper direction of the substrate, and an air outlet discharging the air inlet from the opening. The air flow control mechanism is arranged on a downward of the substrate held in the holding part, and generates the air flow that changes a direction of a rotating flow that is generated by the rotation of a rotor including the substrate, and is directed to an external side of the substrate.SELECTED DRAWING: Figure 3
Inventors:
Kazuo Terada
Application Number:
JP2016187696A
Publication Date:
October 21, 2020
Filing Date:
September 27, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304
Domestic Patent References:
| JP2015035441A | ||||
| JP2005327906A | ||||
| JP2012004245A | ||||
| JP7310980A | ||||
| JP2003303802A |
Attorney, Agent or Firm:
Sakai International Patent Office