Title:
基板温度調整装置および基板温度調整方法
Document Type and Number:
Japanese Patent JP4454243
Kind Code:
B2
Inventors:
Shinichi Inaba
Kyosuke Sugi
Kyosuke Sugi
Application Number:
JP2003095455A
Publication Date:
April 21, 2010
Filing Date:
March 31, 2003
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
F27D21/00; H01L21/205; F27B5/18; F27D9/00; H01L21/02
Domestic Patent References:
| JP2003037073A | ||||
| JP2001196324A | ||||
| JP11506821A | ||||
| JP2002500822A | ||||
| JP9126913A | ||||
| JP5102044A | ||||
| JP2003077851A | ||||
| JP6124955A | ||||
| JP10172919A | ||||
| JP9129750A |
Foreign References:
| WO1996041109A1 |
Attorney, Agent or Firm:
Tamiya Hiroshi