Title:
互いに適合性を有する薬剤を用いた基板のブラシスクラブおよび近接洗浄乾燥手順、近接基板前処理手順、並びに、その方法、装置、および、システム
Document Type and Number:
Japanese Patent JP2007531322
Kind Code:
A
Abstract:
A method for preparing a surface of a substrate is provided. The method includes scanning the surface of the substrate by a meniscus, preparing the surface of the substrate using the meniscus, and performing a next preparation operation on the surface of the substrate that was prepared without performing a rinsing operation.
Inventors:
Lovekin Michael
Delarios John M.
Coloriku Mikaile
Smith Michael G. Earl.
Woods Curl
Delarios John M.
Coloriku Mikaile
Smith Michael G. Earl.
Woods Curl
Application Number:
JP2007506399A
Publication Date:
November 01, 2007
Filing Date:
March 25, 2005
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
H01L21/304; A47L15/00; A47L25/00; B08B1/02; B08B1/04; B08B3/00; B08B3/04; B08B7/00; B08B7/04; H01L21/00
Domestic Patent References:
| JPH0774133A | 1995-03-17 | |||
| JP2002075956A | 2002-03-15 | |||
| JP2003142444A | 2003-05-16 | |||
| JP2003151948A | 2003-05-23 | |||
| JP2002280344A | 2002-09-27 |
Attorney, Agent or Firm:
Meisei International Patent Office