CALIBRATION MEMBER FOR THREE-DIMENSIONAL SHAPE ANALYZER AND METHOD FOR THREE-DIMENSIONAL SHAPE ANALYSIS

Title:

CALIBRATION MEMBER FOR THREE-DIMENSIONAL SHAPE ANALYZER AND METHOD FOR THREE-DIMENSIONAL SHAPE ANALYSIS

Document Type and Number:

Japanese Patent JP2002031520

Kind Code:

A

Abstract:

To provide a Z standard calibration specimen for accurately performing a Z calibration in a scanning electron microscope having a three- dimensional shape analyzing means.

When a silicon substrate is etched, a chemical difference in etching rate is produced by the difference of arrangement of atoms in crystals and a pyramid-shaped structure (micro pyramid) having slopes with accurate angles (54 and 74°) is manufactured. The angles of the slopes of the micro pyramid are utilized for the Z calibration.

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Inventors:

YOSHINARI JUNICHI
TAMOCHI RYUICHIRO
NAKAGAWA MINE
MUTO ATSUSHI
TAKAHASHI KANAME

Application Number:

JP2000303379A

Publication Date:

January 31, 2002

Filing Date:

October 03, 2000

Export Citation:

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Assignee:

HITACHI LTD
HITACHI SCIENCE SYSTEMS LTD

International Classes:

G01B15/00; G01B15/04; (IPC1-7): G01B15/00; G01B15/04

Attorney, Agent or Firm:

Yusuke Hiraki

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