Title:
Ｘ線計測装置の校正方法
Document Type and Number:
Japanese Patent JP7257925
Kind Code:
B2
Abstract:
A calibration method of an X-ray measuring device includes: mounting a calibration tool 102 on a rotating table 120; a moving position acquisition step of parallelly moving a position of an j-th sphere 106 with respect to a position of a first sphere 106, irradiating the calibration tool 102 with an X-ray 118, and acquiring, form an output of an X-ray image detector 124, a moving position Mj where the magnitude of a differential position Erjofa centroid position ImDisjh_Sphr_j of a projected image of the j(2£j£N)-th sphere 106 with respect to a centroid position ImDis1_Sphr_1 of a projected image of the first sphere 106 becomes equal to or less than a specified value Vx; a relative position calculation step of performing the moving position acquisition step on the remaining spheres; a feature position calculation step; a transformation matrix calculation step; a rotation detection step; a position calculation step; and a center position calculation step.
Inventors:
Masato now
Hirotake Shinya
Seiji Sasaki
Miyata Jouta
Hirotake Shinya
Seiji Sasaki
Miyata Jouta
Application Number:
JP2019164919A
Publication Date:
April 14, 2023
Filing Date:
September 10, 2019
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B15/00; G01N23/046
Domestic Patent References:
| JP2007078469A | ||||
| JP2006003200A | ||||
| JP2007333596A | ||||
| JP2005127881A | ||||
| JP2012233919A | ||||
| JP2016538552A | ||||
| JP2015525665A |
Attorney, Agent or Firm:
Patent Attorney Corporation MTS International Patent Office