Title:
CANTILEVER TYPE PROBE
Document Type and Number:
Japanese Patent JP2015045503
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cantilever type probe that is free from shortcomings of conventional such probes and can achieve high-level integration of measurement objects.SOLUTION: A cantilever type probe that comprises a fixed part 12 fixed to a supporting member, a spring part 14 extending for a prescribed length from the fixed part and a contact part 16 that extends in the extending direction of the spring part away from the surface of the supporting member and whose free end comes into contact with a measurement object M. On the contact part, a fulcrum part 18 that comes into contact with the surface of the supporting member is formed; the spring part can be elastically deformed; the contact part and the fulcrum part are more rigid than the base part; when a contact point 16a of the contact part comes into contact with the measurement object and the contact part turns toward the supporting member, the spring part is elastically deformed into a convex shape in a direction away from the supporting member, the supporting member slides on the surface of the supporting member and shifts toward the fixed part, and the positional variation of the contact point in the lengthwise direction due to the turning of the contact part is absorbed.
Inventors:
KOBAYASHI KENICHI
Application Number:
JP2013175148A
Publication Date:
March 12, 2015
Filing Date:
August 27, 2013
Export Citation:
Assignee:
TPS KK
International Classes:
G01R1/067; G01R1/073; H01L21/66
Attorney, Agent or Firm:
Yuichi Kuroda