Title:
CAP OF PROCESS TUBE FOR VERTICAL FURNACE
Document Type and Number:
Japanese Patent JP2546573
Kind Code:
B2
Abstract:
PURPOSE: To eliminate the uneven distribution of exhaust flows within a process tube for vertical furnaces, and prevent the unevenness throughout a wafer surface resulting from such an uneven distribution.
CONSTITUTION: A groove 6 is formed on the side 4b of a cap 4 which is to be inserted into a vertical furnace process tube 1; the groove 6 continues along the circumference 4b of the cap 4 and faces to the exhaust port 1a of the process tube 1. The channel resistance of the groove 6 is minimized. This is equivalent to the entire circumference 4b of the cap 4 facing to the exhaust port 1a. This allows exhaust flows in the vertical furnace process tube 1 to uniformly enter the entire gap between the inner surface of the tube 1 and the side 4b of the cap 4, and eliminates the uneven distribution of exhaust flows.
Inventors:
ONODERA KYOSHI
Application Number:
JP13262892A
Publication Date:
October 23, 1996
Filing Date:
May 25, 1992
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
C23C16/44; C23C16/455; H01L21/22; H01L21/324; (IPC1-7): H01L21/22; H01L21/324
Domestic Patent References:
| JP6366927A |
Attorney, Agent or Firm:
Tetsuya Mori (2 others)