Title:
CAPACITANCE TYPE ACCELERATION SENSOR AND ITS CALIBRATION AND DIAGNOSING METHOD
Document Type and Number:
Japanese Patent JP3145040
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To perform self diagnosis and self calibration in on-line mode by detecting acceleration based on capacitance between first and second electrodes.
SOLUTION: A detector 5 is composed of a detecting means 1, an exciting means 2 provided integrally with and close to the detecting means 1 and a signal processing means 4. A multiplexer is actuated by an instruction from the microcomputer of the means 4, the output signal of the means 1 is converted into a digital signal and based on the value thereof, a power supply voltage is supplied or a correcting signal is added to the means 2. Thus, a detected output is obtained, which enables an error to be corrected. In an acceleration sensor, a load 53 and a cantilever 54 for supporting the load 53 are formed in a center silicon substrate 51 by anisotropic etching. Upper fixed electrodes 55a and 55b are formed in surfaces opposed to loads placed on upper and lower substrates 52a and 52b positioned on the upper and lower parts of this substrate 51, displacement is calculated from capacitance between the fixed electrode and the load (movable electrode) and acceleration is measured.
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Inventors:
Satoshi Shimada
Kiyomitsu Suzuki
Shigeki Tsuchiya
Seiichi Ukai
Masami Kaneyasu
Hiroshi Kuroiwa
Yokota Yoshihiro
Kiyomitsu Suzuki
Shigeki Tsuchiya
Seiichi Ukai
Masami Kaneyasu
Hiroshi Kuroiwa
Yokota Yoshihiro
Application Number:
JP27582496A
Publication Date:
March 12, 2001
Filing Date:
October 18, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01P21/00; B81B3/00; G01P15/125; G01P15/13; (IPC1-7): G01P21/00; G01P15/125
Domestic Patent References:
| JP6385461A | ||||
| JP1240865A |
Attorney, Agent or Firm:
Yasuo Sakuta