Title:
CAPACITANCE TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2014126504
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce the amount of contaminant deposited on a pressure-sensitive diaphragm.SOLUTION: A large diameter hole 50A forming a slit-like space (cavity) 20A between a first pedestal plate 21 and a second pedestal plate 22 is formed in a central part of a support diaphragm 50. An introduction port 21a for fluid to be measured that communicates with the slit-like space (cavity) 20A is formed in a central part of the first pedestal plate 21. The second pedestal plate 22 includes a plurality of delivery ports 22a that communicate with the slit-like space (cavity) 20A and sends the fluid to be measured to a sensor diaphragm 32. The introduction port 21a of the first pedestal plate 21 and the delivery ports 22a of the second pedestal plate 22 are disposed at positions at which they do not overlap each other in the thickness direction of the first pedestal plate 21 and second pedestal plate 22.
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Inventors:
ISHIHARA TAKUYA
TOCHIGI ISHIN
TOCHIGI ISHIN
Application Number:
JP2012284704A
Publication Date:
July 07, 2014
Filing Date:
December 27, 2012
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L9/12; G01L19/06
Domestic Patent References:
| JP2006010539A | 2006-01-12 | |||
| JP2011149946A | 2011-08-04 | |||
| JPH01141329A | 1989-06-02 | |||
| JP2006003234A | 2006-01-05 | |||
| JP2007113969A | 2007-05-10 | |||
| JP2008008688A | 2008-01-17 | |||
| JP2002111011A | 2002-04-12 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa
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