Title:
容量素子及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP7022312
Kind Code:
B2
Abstract:
A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.
Inventors:
Lee Dong Wei
Yasunori Ando
Yasunori Ando
Application Number:
JP2018010961A
Publication Date:
February 18, 2022
Filing Date:
January 25, 2018
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
H01G5/06; H01G5/013; H01G5/08; H05H1/46
Domestic Patent References:
| JP2032515A | ||||
| JP2013134836A | ||||
| JP2013152788A | ||||
| JP2017063000A | ||||
| JP51137639U |
Attorney, Agent or Firm:
Nishimura Ryuhei
Shindai Saito
Shindai Saito