Title:
容量素子及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP7022313
Kind Code:
B2
Abstract:
To make capacitance variable without damaging a pair of fixed electrodes and a dielectric provided so as to be able to enter and exit between these electrodes while preventing a significant decrease in the capacitance.SOLUTION: A capacitance element includes a pair of fixed electrodes provided opposite to each other, a solid dielectric provided so as to be able to enter and exit between the fixed electrodes, a container that houses the pair of fixed electrodes and the solid dielectric, and a liquid dielectric introduced into the container and interposed between the pair of fixed electrodes.SELECTED DRAWING: Figure 4
Inventors:
Osamu Nakata
Yasunori Ando
Kiyoshi Kubota
Yasunori Ando
Kiyoshi Kubota
Application Number:
JP2018013771A
Publication Date:
February 18, 2022
Filing Date:
January 30, 2018
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
H01G5/013; C23C16/509; H05H1/46
Domestic Patent References:
| JP869945A | ||||
| JP232515A | ||||
| JP644207U |
Attorney, Agent or Firm:
Nishimura Ryuhei
Shindai Saito
Shindai Saito
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