Title:
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2023014045
Kind Code:
A
Abstract:
To provide a carboxylate and a carboxylic acid generator that can produce a resist pattern having excellent pattern collapse resistance, and a resist composition comprising the same.SOLUTION: Specifically, a carboxylate represented by, for example, the formula (I-1), a carboxylic acid generator and a resist composition are illustrated.SELECTED DRAWING: None
Inventors:
SHIMADA MASAHIKO
ICHIKAWA KOJI
ICHIKAWA KOJI
Application Number:
JP2022112559A
Publication Date:
January 26, 2023
Filing Date:
July 13, 2022
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C07D305/06; C09K3/00; G03F7/004; G03F7/039; G03F7/20
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
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