CARRIER AND METHOD OF SIMULTANEOUSLY MACHINING WORK ON BOTH SIDES

Title:

CARRIER AND METHOD OF SIMULTANEOUSLY MACHINING WORK ON BOTH SIDES

Document Type and Number:

Japanese Patent JP3851310

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To obtain a cost advantage as compared with a case using a carrier and method by known prior art, especially by reducing a scratching rate in a work in an initial stage of using the new carrier.
SOLUTION: A side surface 10 of another notch 4 has an average roughness valve of not more than 10μm in a measurement section of 4.8 mm.

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Inventors:

Guido Vensky
Gregor Hellker
Gerhard Hire

Application Number:

JP2003369324A

Publication Date:

November 29, 2006

Filing Date:

October 29, 2003

Export Citation:

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Assignee:

Siltronic AG

International Classes:

B24B41/06; H01L21/304; (IPC1-7): B24B37/04; H01L21/304

Domestic Patent References:

JP11347924A
JP60197366A
JP2001358095A
JP2001030161A
JP2002018708A

Attorney, Agent or Firm:

Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel

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