Title:
カセット筐体、プローバー、サーバーラックおよびストレージシステム
Document Type and Number:
Japanese Patent JP7456066
Kind Code:
B2
Abstract:
Provided is a cassette housing which can carry out temperature adjustment with respect to a semiconductor wafer including a plurality of nonvolatile memory chips.According to one embodiment, a cassette housing includes a storage unit, a probe card, and a container. The storage unit stores a semiconductor wafer including a plurality of nonvolatile memory chips. The probe card includes a probe to be brought into contact with a pad electrode provided on the semiconductor wafer. The container contains heat transfer fluid for lowering or raising temperature of one or both of the probe card and the semiconductor wafer stored in the storage unit.
Inventors:
Tatsuro Hitomi
Yasuto Yoshimizu
Arata Inoue
Hiroyuki Domae
Hayasaka alone
Tomoya Sanuki
Yasuto Yoshimizu
Arata Inoue
Hiroyuki Domae
Hayasaka alone
Tomoya Sanuki
Application Number:
JP2023508202A
Publication Date:
March 26, 2024
Filing Date:
March 23, 2021
Export Citation:
Assignee:
Kioxia Corporation
International Classes:
G06F12/00
Domestic Patent References:
| JP2020194889A | ||||
| JP2016171241A |
Foreign References:
| WO2021095252A1 |
Attorney, Agent or Firm:
Suzue International Patent Office