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Title:
CASSETTE STORAGE AND TREATMENT FACILITY FOR PLATE TO BE TREATED
Document Type and Number:
Japanese Patent JP2006306504
Kind Code:
A
Abstract:

To perform detection of a support position of a plate to be treated in a cassette during conveying in an automatic warehouse in a facility in which a storage automatic warehouse of the cassette for storing the plate to be treated and a treatment device for performing processing treatment of the plate to be treated taken out from the cassette are combined.

The cassette storage and the treatment facility for the plate to be treated are provided with a cassette storage shelf 25A for three-dimensionally storing the cassette K for storing a plurality of sheets of the plates to be treated in multi-stages; an arrival/delivery device 1 capable of traveling along the storage shelf 25A and provided with a cassette transferring means 7 on a lifting carriage 6; and a plate taking out/conveying-in device 31A for taking out the plate to be treated from the cassette K delivered from the arrival/delivery device 1 every one sheet and feeding to the treatment device 30A. A plate detection device 42 for obtaining mapping data of the plate to be treated in the cassette K transferred from the inside of the storage shelf 25A onto the lifting carriage 6 is mounted on the lifting carriage 6 of the arrival/delivery device 1.


Inventors:
MORIYA SUSUMU
ONO TAKAYOSHI
Application Number:
JP2005124816A
Publication Date:
November 09, 2006
Filing Date:
April 22, 2005
Export Citation:
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Assignee:
DAIFUKU KK
International Classes:
B65G1/04; B65G49/06; B65G49/07; H01L21/67
Domestic Patent References:
JP2004315191A2004-11-11
JP2001274224A2001-10-05
JP2004217379A2004-08-05
JP2002313877A2002-10-25
JP2001223197A2001-08-17
JP2004214462A2004-07-29



 
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