Title:
電子ビーム生成用カソード部材およびその製造方法
Document Type and Number:
Japanese Patent JP6922054
Kind Code:
B2
Abstract:
To provide a cathode member for electron beam production, which is superior in electron emission characteristic, and a method for manufacturing the same.SOLUTION: A cathode member for electron beam production according to the present invention comprises single phase or two phases of a compound containing iridium and cerium, which account for 95 area % or more, in which the total content of one or more sub-components of metal iridium, and oxide of one or more elements of iridium and cerium is 5 area % or less. A method for manufacturing the cathode member for electron beam production comprises: a melting step of melting metal cerium material and metal iridium material to obtain an ingot material; a pulverizing step of pulverizing the ingot material into a pulverized material; a sintering step of sintering the pulverized material of the ingot material in a predetermined high-temperature, high-humidity atmosphere to obtain a sintered material for crystal material production; and a crystal material producing step of using the sintered material for crystal material production to produce a crystal material of a compound containing iridium and cerium by a floating zone method.SELECTED DRAWING: Figure 1
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Inventors:
Kenji Koga
Toshiaki Takagi
Kudo Fumiaki
Kusamichi Tatsuhiko
Toshiaki Takagi
Kudo Fumiaki
Kusamichi Tatsuhiko
Application Number:
JP2020135113A
Publication Date:
August 18, 2021
Filing Date:
August 07, 2020
Export Citation:
Assignee:
Kobelco Kaken Co., Ltd.
International Classes:
H01J1/304; C01G55/00; C22C5/04; C30B13/22; C30B29/52; H01J1/144; H01J9/02; H01J9/04; H01J19/064; H01J19/24
Domestic Patent References:
| JP2015198034A | ||||
| JP8255564A | ||||
| JP2002527855A | ||||
| JP2002529899A | ||||
| JP2002260520A | ||||
| JP8171852A |
Foreign References:
| WO2018016286A1 |
Attorney, Agent or Firm:
Norihito Yamao
Junko Yamada
Junko Yamada