PURPOSE: To dry bodies to be dried without causing contamination when each cradle holding the bodies is rotated to centrifugally dry the bodies, by constructing the cradle so that the bodies are nearly perfectly covered.

CONSTITUTION: Bodies 5 to be dried such as semiconductor wafers are put in each carrier 6, the carrier 6 is held in a cradle 4 and the cradle 4 is rotated to centrifugally dry the bodies 5. The cradle 4 has been constructed so that the bodies 5 are nearly perfectly covered. The cradle 4 has holes 4d for draining and a lid 4b for putting in and taking out the bodies 5. The bodies 5 to be dried can be dried without causing contamination.