Title:
CERAMIC-COATED QUARTZ GLASS BODY
Document Type and Number:
Japanese Patent JP2001261375
Kind Code:
A
Abstract:
To obtain a ceramic-coated quartz glass body having neither peeling nor damage of a ceramic layer even if repeatedly subjected to thermal shocks being controlled in dust, etc., having excellent chemical resistance and excellent handleability.
This ceramic-coated quartz glass body is obtained by coating the surface of a porous quartz glass body 3 or the surface a porous quartz glass layer formed on a quartz glass body with ceramic layers 1 and 2. The ceramic-coated quartz glass body is produced by forming a ceramic layer on the surface of the porous quartz glass body or the porous quartz glass layer by a chemical vapor-phase growth reaction, then taking out the porous quartz glass from a furnace and cleaning the ceramic layer with an acid.
Inventors:
SATO HIROMASA
TAKEDA SHUICHI
INABA TAKESHI
SOTODANI EIICHI
TAKEDA SHUICHI
INABA TAKESHI
SOTODANI EIICHI
Application Number:
JP2000070477A
Publication Date:
September 26, 2001
Filing Date:
March 14, 2000
Export Citation:
Assignee:
TOSHIBA CERAMICS CO
International Classes:
C03C17/22; C23C16/34; C23C16/42; (IPC1-7): C03C17/22
Attorney, Agent or Firm:
Shigeru Kinoshita
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