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Title:
CHAMBER DEVICE AND HEATING METHOD
Document Type and Number:
Japanese Patent JP2015048974
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a chamber device capable of accommodating a base plate in a clean environment, and a heating method.SOLUTION: A chamber device includes a chamber that has an internal space capable of partially accommodating a base plate, a heating part that heats the base plate arranged in the internal space, and a temperature regulation part that regulates a temperature of a part, brought into contact with the internal space, of the chamber.

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Inventors:
SAHODA TSUTOMU
SHO YOSHIAKI
MIYAMOTO HIDENORI
KIKUCHI YUBUN
Application Number:
JP2013180600A
Publication Date:
March 16, 2015
Filing Date:
August 30, 2013
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
F27D11/02; F27B9/24; F27B17/00; F27D19/00; H01L21/683
Domestic Patent References:
JP2012253343A2012-12-20
JP2009173969A2009-08-06
JP2011166087A2011-08-25
JP2009144211A2009-07-02
JP2012081428A2012-04-26
JPH06244145A1994-09-02
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Mitsuyoshi Suzuki
Igarashi Mitsunaga



 
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