Title:
CHARGED CORPUSCULAR RAY DEVICE
Document Type and Number:
Japanese Patent JP3470726
Kind Code:
B2
Abstract:
PURPOSE: To provide a charged corpuscular ray device capable of quickly moving a sample stage driving mechanism to a required position within its movable range
CONSTITUTION: When a sample is separated from an objective lens 30mm, and inclined to perform its sample observation, an operator operates a marker control circuit 7 to move a marker M to the area within the movable range. When a mouse is used as the marker control circuit 7, the button of the mouse is pushed to set the moving position of a sample stage. A display control circuit 5 transmits, to a sample stage driving circuit 4, a signal (Z=30mm, T=30°) for moving a moving body 8 in the optical axial direction and an inclined body 9 to a position instructed by the marker M. The sample stage driving circuit 4 moves the moving body 8 in the optical axial direction and inclines the inclined body 9 by 30° on the basis of this signal.
Inventors:
Makoto Tsuzuki
Application Number:
JP24347793A
Publication Date:
November 25, 2003
Filing Date:
September 30, 1993
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/20; (IPC1-7): H01J37/20
Domestic Patent References:
| JP311539A | ||||
| JP326046U | ||||
| JP6379187U |
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