CHARGED PARTICLE APPARATUS - MITSUBISHI ELECTRIC CORP

Title:

CHARGED PARTICLE APPARATUS

Document Type and Number:

Japanese Patent JPS6362200

Kind Code:

A

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Inventors:

YAMAMOTO SHUNJI
YAMADA TADATOSHI
MORITA MASAO

Application Number:

JP20512386A

Publication Date:

March 18, 1988

Filing Date:

September 02, 1986

Export Citation:

Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

H05H7/04; H05H13/00; H05H13/04; (IPC1-7): H05H7/04; H05H13/00

Domestic Patent References:

JPS61188907A	1986-08-22
JPS61294800A	1986-12-25

Attorney, Agent or Firm:

Soga Doteru

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