To obtain a charged particle beam acceleration device which has a small installation space, and is reduced in production cost, and to obtain a radiation exposure facility which can make radiation shield steadily using this acceleration device and of which construction cost is low.
The charged particle beam acceleration device 50 comprises an electron gun 11 that generates charged particle beams, an accelerator body 12 that has an acceleration cavity 13 for accelerating the charged particle beams and deflection electromagnetic 52, 53 for deflecting the accelerated charged particle beams, a supporting table 23 for supporting this accelerator body 12, a power amplifier 15 for amplifying the high frequency power, and a coaxial tube 16 for guiding the high frequency power to the acceleration cavity 13. As the power amplifier 15 is arranged in the space below the supporting table 23, the installation space is reduced. As this acceleration device 50 is covered by the radiation shielding material, it is not necessary to make radiation shield of the whole radiation exposure facility, thereby construction cost is reduced.
| JP3948517 | PROTECTION DEVICE OF DISASTER PREVENTING EQUIPMENT |
| JP2013170892 | RADIATION PROTECTOR |
TANAKA HIROBUMI
GAMA ETSUTORA
CHIKUSHIMA CHIHIRO
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