Title:
CHARGED PARTICLE BEAM APPARATUS
Document Type and Number:
Japanese Patent JP2019169406
Kind Code:
A
Abstract:
To propose a charged particle beam apparatus for acquiring an image focused on a sample's top and bottom while suppressing a visual field deviation to be generated in focusing on each of the sample's top and bottom.SOLUTION: There is proposed a charged particle beam apparatus that on the basis of irradiation with a beam having a focus adjusted on a top side of a sample, forms a first image (301) based on detection of charged particles having first energy; on the basis of irradiation with a beam having a focus adjusted on a bottom side of a pattern included in the sample, forms a second image (304) based on detection of charged particles having second energy relatively higher than the first energy and a third image (303) based on detection of charged particles having the first energy; calculates a deviation between the first image and the third image; and synthesizes the first image and the second image so as to correct the deviation.SELECTED DRAWING: Figure 3
Inventors:
TAKASUGI YASUNORI
YAMAGUCHI SATOSHI
SAKAI KEI
ITAI HIDEKI
MOMOI YOSHINORI
KAMEDA TOSHIMASA
KIMURA YOSHIHIRO
YAMAGUCHI SATOSHI
SAKAI KEI
ITAI HIDEKI
MOMOI YOSHINORI
KAMEDA TOSHIMASA
KIMURA YOSHIHIRO
Application Number:
JP2018057510A
Publication Date:
October 03, 2019
Filing Date:
March 26, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/22; G01N23/2251; H01J37/244
Attorney, Agent or Firm:
Shigemi Iwasaki