To improve operability in exploring the optimum setting value by dynamically controlling a change speed (change amount per unit time) of the setting value of a control target device in a charged particle beam device.

A graphic user interface 32 is provided with a slider having a marker installed so that a user is able to carry out moving operation of its position. The change speed of the device setting value changes according to a displacement amount of the marker from the reference position. If the user makes the moving operation of a marker position on the slider active, the obtained displacement amount of the marker from the reference position is converted into a value of the change speed by a conversion means 35. A command based on this converted value is transmitted to a device 31 by a set constant time interval. While the moving operation of the marker position is active, treatment of transmitting the renewed command based on the re-obtained displacement amount of the marker from the reference position to the device 31 is continued.

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