To achieve short focus of a high acceleration voltage by providing an objective lens control method for alleviating magnetic saturation in a device in which two or more objective lenses are combined and mounted.
There is provided a charged particle beam device which includes: charged particle beam acceleration means accelerating a charged particle beam emitted from a charged particle source; convergence means converging the charged particle beam accelerated by the charged particle beam acceleration means; scanning means two-dimensionally scanning a sample with the charged particle beam accelerated by the convergence means; and an objective lens converging the charged particle beam scanned by the scanning means on the sample. The objective lens is composed of a plurality of magnetic poles and a plurality of coils. A power supply independently applying a current to the plurality of coils is provided to simultaneously apply a current to the plurality of coils.
AGEMURA TOSHIHIDE
Yuji Toda
Shigemi Iwasaki