Title:
COMPOSITE CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2014041734
Kind Code:
A
Abstract:
To provide a technique by which high resolution observation is made possible while keeping a sample in a cross-point position in a complex charged particle beam device equipped with a plurality of charged particle beam columns.
A sample 103 is placed at a cross-point 171 where an optical axis 101b of an ion beam column 101a and an optical axis 102b of an electron beam column 102b are intersected with each other, and a plurality of detachable components 108 constituting the tip of an objective lens are replaced, thereby changing the distance between the column tip and the sample 103 without changing a position of the cross-point 171.
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Inventors:
NOMAGUCHI HISANORI
AGEMURA TOSHIHIDE
AGEMURA TOSHIHIDE
Application Number:
JP2012182833A
Publication Date:
March 06, 2014
Filing Date:
August 22, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/28; H01J37/16; H01J37/24; H01J37/317
Domestic Patent References:
JP2012054169A | 2012-03-15 | |||
JPS57118356A | 1982-07-23 | |||
JPH0757677A | 1995-03-03 | |||
JPH05182625A | 1993-07-23 | |||
JP2006210254A | 2006-08-10 | |||
JP2010157370A | 2010-07-15 | |||
JP2006012583A | 2006-01-12 | |||
JP2006114225A | 2006-04-27 | |||
JPH09190790A | 1997-07-22 | |||
JPS61267246A | 1986-11-26 | |||
JPH11111211A | 1999-04-23 |
Foreign References:
US20110012018A1 | 2011-01-20 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki