Title:
荷電粒子線装置
Document Type and Number:
Japanese Patent JP7173937
Kind Code:
B2
Abstract:
A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.
Inventors:
Takafumi Miwa
Youhei Nakamura
Natsumi Tsuno
Heita Kimizuka
Fukuda Muneyuki
Youhei Nakamura
Natsumi Tsuno
Heita Kimizuka
Fukuda Muneyuki
Application Number:
JP2019146175A
Publication Date:
November 16, 2022
Filing Date:
August 08, 2019
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01L21/66; G01N23/2251; H01J37/22; H01J37/28
Domestic Patent References:
| JP2001313322A | ||||
| JP2010205864A | ||||
| JP2018137160A |
Attorney, Agent or Firm:
Patent Attorney Tsutsui International Patent Office