To make possible to draw the high precision line pattern, increasing degree of freedom in drawing a high precision line pattern, determine a defect and measure a length, not only forming a linear beam to a X-axis and a Y-axis directions, but also forming a linear beam to a certain direction.

It is to collect a charged particle beam ejected from a charged particle source on a sample material by a lens for the charged particle, combine an octpole or a dodecapole structure of the lens with two or more stages, in a electron beam system deflecting and scanning the electron beam disposed to the sample material, and form the linear beam to a direction rotated at a certain angle from the X-axis and XY axis by controlling an exciting condition of each electrode or magnetic pole.