To perform remote monitoring of an electron microscope arranged to a client side, properly using a know-how including in a service server side for monitoring an electron generation chip of an electron gun, improve a service to the client, and improve an availability of the electron microscope.
An image indicating availability state of a plurality of electron microscopes respectively in clients is input to the service server, an emission current and a derived voltage of power supply for an electron gun are extracted among images, an estimated remaining life time of an electron generation chip to an using limit value of emission current from a present value is calculated on a base of an emission current changing speed of an every-changing present value data of the emission current and the derived voltage to a time axis, the estimated remaining life time of the electron generation chip to the using limit value of the derived voltage from the present value is also calculated on a base of changing speed of the derived voltage, and an arriving time information to the estimated remaining life time generated fast at any estimated remaining life time is output to a client terminal.
YAMAZAKI TAKASHI
KITAZAWA MITSUGI
HIRANE KENICHI
HITACHI SCIENCE SYSTEMS LTD