Title:
CHARGED PARTICLE BEAM SCANNING MODULE, CHARGED PARTICLE BEAM DEVICE, AND COMPUTER
Document Type and Number:
Japanese Patent JP2023021705
Kind Code:
A
Abstract:
To provide a charged particle beam scanning module capable of correcting an INL error in DAC circuits in real time, a charged particle beam device and a computer.SOLUTION: A charged particle beam scanning module contains a scanning controller which outputs a digital signal for scanning a charged particle beam; a DAC circuit which converts the digital signal for scanning into an analog signal for scanning and outputs it; and an ADC circuit which converts the analog signal for scanning into a digital signal for evaluation. A sampling frequency at which the DAC circuit samples the digital signal for scanning is a first frequency. A sampling frequency at which the ADC circuit samples the analog signal for scanning is a second frequency that is lower than the first frequency. The scanning controller determines output characteristics of the DAC circuit by evaluating the digital signal for scanning and the digital signal for evaluation.SELECTED DRAWING: Figure 6
Inventors:
RI UEN
MURAKAMI SHINICHI
TAKAHASHI HIROYUKI
SUZUKI MAKOTO
MORI WATARU
MURAKAMI SHINICHI
TAKAHASHI HIROYUKI
SUZUKI MAKOTO
MORI WATARU
Application Number:
JP2021126744A
Publication Date:
February 14, 2023
Filing Date:
August 02, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/147; G01B15/04; H01J37/22
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office
Previous Patent: JPWO2023021704
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