To provide a charged particle beam transferring apparatus capable of highly precisely correcting astigmatism, which is little in aberration and fog.

This charged particle beam transferring apparatus is for transferring a pattern of a mask 7 in which the transfer region is divided into a plurality of auxiliary visual fields to a wafer 13 for every auxiliary visual field one by one. A first astigmatism-correcting coil 5 for correcting the linear strain of every auxiliary visual field is disposed near the main face of a projection lens 8 in the mask side and a second astigmatism-correcting coil 11 is disposed at a cross-over 9 position in the projection optical system. The linear strain of each auxiliary visual field is corrected by the first astigmatism-correcting coil 5 and the astigmatism of a mask image caused by the correction is corrected by the second astigmatism-correcting coil 11.