Title:
CHARGED PARTICLE-RADIATING SYSTEM
Document Type and Number:
Japanese Patent JP3895535
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and apparatus for controlling electron emittance.
SOLUTION: In the method and apparatus, a lens row is disposed in a drift space for components of a charged particle radiating system. The components of the radiating system are an electron gun and a linear tube or drift tube mounted on the electron gun. The lens row is a mesh grid or a combination of the mesh grid and continuous foil. The lens row forms a plurality of micro- lenses for imitating an optical flying-eye lens. The lens row separates an actual incident electron beam into a plurality of sub-beams. As a result, beam emittance outputted is different from the incident emittance, but the total current for the beam remains unchanged.
Inventors:
Peter Kurtz
Daniel Moonen
Victor Cassap
Warren Kay Waskiwick
Daniel Moonen
Victor Cassap
Warren Kay Waskiwick
Application Number:
JP2000309801A
Publication Date:
March 22, 2007
Filing Date:
October 10, 2000
Export Citation:
Assignee:
Lucent Technologies, Inc.
International Classes:
G21K5/04; G03F7/20; H01J37/065; H01J37/12; H01J37/305; H01L21/027; (IPC1-7): H01J37/065; G03F7/20; G21K5/04; H01J37/12; H01J37/305; H01L21/027
Domestic Patent References:
| JP10261380A | ||||
| JP6338446A | ||||
| JP61263217A | ||||
| JP61085055U | ||||
| JP2078143A | ||||
| JP4332409A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Hirofumi Mimata
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Hirofumi Mimata