Title:
CHEMICAL LIQUID NOZZLE
Document Type and Number:
Japanese Patent JP3398272
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chemical liquid nozzle which can deliver a chemical accurately and stably to a target position.
SOLUTION: A developer introduced externally to a developer delivery nozzle 4 is temporarily introduced through a first channel 42 to a lowest point 41. Subsequently, it is introduced through a second channel 44 to a highest point 43 higher than the lowest point 41. A third channel 45 imparts a vertically downward speed component to the developer delivered from the second channel 44. The developer 46 is delivered from the third channel 45 through a developer delivery port 46 to a substrate W. Since the developer is imparted only with a vertically downward speed component at the time of delivery, it touches the surface of the substrate W at an accurate point.
Inventors:
Masami Ohtani
Tadashi Sasaki
Tadashi Sasaki
Application Number:
JP31690595A
Publication Date:
April 21, 2003
Filing Date:
December 05, 1995
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/30; H01L21/027; H01L21/304; H01L21/306; (IPC1-7): H01L21/027; G03F7/30; H01L21/304; H01L21/306
Domestic Patent References:
| JP5168982A | ||||
| JP8255745A | ||||
| JP7326554A | ||||
| JP6182283A | ||||
| JP4186719A | ||||
| JP9148212A | ||||
| JP7115051A | ||||
| JP63310657A | ||||
| JP8258062A | ||||
| JP6260405A | ||||
| JP4247264A | ||||
| JP4110152U | ||||
| JP60108381U | ||||
| JP568092B2 |
Attorney, Agent or Firm:
Shiro Ogasawara
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