Title:
CHEMICAL REACTIVE ABRASIVE
Document Type and Number:
Japanese Patent JP3660318
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive chemical reactive abrasive which can work the surface of a ground material to an extremely smooth mirror surface, can prevent the ground surface from being contaminated, and moreover, can prevent environmental pollution caused by working liquid.
SOLUTION: After a chemical reaction layer is formed on the surface of the ground material, the chemical reaction layer is removed by the chemical reactive abrasive to work the surface of the ground material. The raw material of the abrasive is fluoromica. The surface of the ground material can be worked to the mirror surface having no layer modified by treatment. Since the abrasive itself reacts on the ground material, chemically active working liquid is not needed for reaction, and water can be used as grinding liquid. Herewith, there is no occurrence of environmental pollution caused by the working liquid. Since fluoromica is easily manufactured, the cost of the abrasive can be held down, and the working cost of the ground material can be reduced.
Inventors:
Shojiro Okada
Yasunaga Nobuo
Yasunaga Nobuo
Application Number:
JP2002061724A
Publication Date:
June 15, 2005
Filing Date:
March 07, 2002
Export Citation:
Assignee:
Japan Grain Research Institute Co., Ltd.
International Classes:
B24B37/00; C09K3/14; H01L21/304; (IPC1-7): H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP54106990A | ||||
| JP9201761A | ||||
| JP54106988A |
Attorney, Agent or Firm:
Yasunobu Yamauchi
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