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Patent Searching and Data


Title:
CHIP MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2002110588
Kind Code:
A
Abstract:

To provide a method for effectively preventing chip defect or crack by shortening TAT(turn-around-time) for dividing a semiconductor bar into individual semiconductor chip and containing them in a tray; reducing occupied area of production floor for apparatus, jig for conveyance, and storage site for materials in process; and combining methods for dividing the semiconductor bar into individual chips to add stable stress to the semiconductor chip.

A chip manufacturing apparatus 101 consistent with the invention comprises a laser irradiating section 106 for forming melting dent 107 on the programmed division line 8 with the semiconductor bar 2 held and sequentially moved by a roll UV adhesive tape 102, a dividing section 108 for dividing the semiconductor bar 2, a heating lamp 111 for widening spacing of the semiconductor chip 1, a UV irradiation lamp 112 for lowering the holding power of the adhesive tape 102, and a vacuum absorption collet 115 for shuffling the semiconductor chip 1 to a containing tray 114 respectively arranged along its moving path in this order.


Inventors:
KAWASHIMA ISAMU
Application Number:
JP2000293223A
Publication Date:
April 12, 2002
Filing Date:
September 27, 2000
Export Citation:
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Assignee:
KANSAI NIPPON ELECTRIC
International Classes:
H01L21/67; H01L21/301; H01L21/677; H01L21/68; (IPC1-7): H01L21/301; H01L21/68