Title:
CLEAN BENCH DEVICE
Document Type and Number:
Japanese Patent JP2021116944
Kind Code:
A
Abstract:
To provide a clean bench device which can provide a high air cleanliness while reducing cost and size.SOLUTION: The present invention includes: a first cleaning chamber 10; a first clean air supplying part 11 supplying the cleaned air into the first cleaning chamber 10; a second cleaning chamber 20 provided inside the first cleaning chamber 10 and having a work table 24 therein; a second clean air supplying part 21 provided on a ceiling part 13 of the second cleaning chamber 20, into which the air supplied from the first clean air supplying part 11 is introduced, and which sends out the cleaned air into the second cleaning chamber 20; and an air flow passage 30 formed inside the first cleaning chamber 10. The air flow passage 30 includes a passage 31 that runs from the first clean air supplying part 11 through the second clean air supplying part 21 into the second cleaning chamber 20, and further runs out of a lower side of the work table 24 and runs upward into a space inside the first cleaning chamber 10 which is a space outside of the second cleaning chamber 20 and is re-introduced into the second clean air supplying part 21.SELECTED DRAWING: Figure 3
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Inventors:
ITO KENICHI
TSUCHIYA HITOSHI
NAGATA YUJI
TSUCHIYA HITOSHI
NAGATA YUJI
Application Number:
JP2020008983A
Publication Date:
August 10, 2021
Filing Date:
January 23, 2020
Export Citation:
Assignee:
FANUC LTD
International Classes:
F24F7/06; B01L1/00
Attorney, Agent or Firm:
Masayuki Masabayashi
Tetsuo Shiba
Hiroaki Hoshino
Tetsuo Shiba
Hiroaki Hoshino