Title:
CLEAN ROOM AND ITS CONSTRUCTION METHOD
Document Type and Number:
Japanese Patent JP3283000
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a clean room and its construction method capable of eliminating excess investment, constructing at a low cost and shortening an execution period up to the rise of a facility.
SOLUTION: The inside of a building outer shell 3 on a foundation floor part 2 is provided with a ceiling room 8, a disposal room 7 on a floor structural part 4 and an underfloor room 6 under the floor structural part 4. In the clean room clean air flows down from the ceiling room 8 to the underfloor room 6 via the disposal room. In this case, a number of frame-like floor structural bodies 5 are disposed on the foundation floor part 2 in the building outer shell 3 to compose the floor structural part 4, a floor structural body 5a for setting each disposal device 10 easily composes the floor structural part 4 satisfying load resistance and vibration resistant performance required for the disposal device 10 without any excess or shortage by making structure suitable for the setting specifications of the disposal device 10, and the clean room can be constructed in a short execution time and at a low cost.
More Like This:
Inventors:
Norishige Aoki
Masato Fujita
Akira Mitsui
Seiji Ueda
Masato Fujita
Akira Mitsui
Seiji Ueda
Application Number:
JP16066998A
Publication Date:
May 20, 2002
Filing Date:
June 09, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
E04H5/02; F24F7/06; H01L21/02; (IPC1-7): E04H5/02; F24F7/06; H01L21/02
Domestic Patent References:
| JP5239905A | ||||
| JP6314025A |
Attorney, Agent or Firm:
Masaru Ishihara